| Year | Detail |
| 1966 |
The Flouroware was founded. |
| 1979 |
The company EMPAK was founded. |
| 1996 |
The company began manufacturing in Malaysia. |
| 1999 |
The companies EMPAK and Flouoware were merged to form Entegris. |
| 2000 |
Entegris acquired NT International, and it was listed on NASDAQ. |
| 2001 |
Mykrolis was founded through Millipore spinoff, a liquid and gas purification and contamination control company. |
| 2004 |
Entegris acquired SNEF's Precision parts cleaning business and offsite cleaning facility in Montpellier, France. |
| 2005 |
Entegris and Mykrolis merged. It also expanded its business to Malaysia. It launched a Lean Sigma program. |
| 2007 |
The company acquired Surmet's semiconductor coatings business to enter High-purity and specialty coating segments. |
| 2008 |
The company acquired Poco Graphite, which produces High-performance graphite and silicon carbide, and PureLine, a fluid-handling component manufacturer in South Korea. |
| 2012 |
Entegris Precision Technology acquired an HDPE drum manufacturing company in Taiwan. |
| 2013 |
Entegris Precision Technology acquired Jetalon Solutions, a chemical concentration sensors and analyzers company. |
| 2014 |
The company acquired ATMI, an advanced materials and material delivery systems company. And Opened i2M Center. |
| 2017 |
Entegris partnered with Spectrum Materials to manufacture specialty chemicals in China. It also acquired the Microelectronics filtration product line from WL Gore and Associates. |
| 2019 |
Entegris acquired Digital Speciality Chemicals, MPD Chemicals, and Hangzhou Anow Microfiltration companies. |
| 2020 |
The company acquired GMTI and CRP, an advanced process monitoring for CMP chemistries. |
| 2021 |
The company acquired Precision Microchemicals, a CMP slurries for SiC, and high-purity cleaners for HDD. |
| 2022 |
The company acquired CMC Materials, CMP products, and technology for the semiconductor industry. |