Year | Detail |
1980 |
Lam Research was founded in 1980 by David K. Lam and is headquartered in Fremont, California. |
1981 |
The company introduced its first product, the AutoEtch 480, an automated polysilicon plasma etcher. The name AutoEtch was chosen to convey that the etcher was automated. |
1987 |
The company introduced its first Rainbow etch product, a piece of equipment representing the most advanced chip manufacturing technology. |
1990 |
The company introduced SP Series spin clean systems. |
1993 |
The company released Concept Two ALTUS CVD tungsten system. |
1995 |
The company introduced the first dual-frequency confined dielectric etch product. |
2002 |
The company opened a campus in Tualatin, Oregon, expanding its engineering and manufacturing infrastructure; the facility was designed to produce copper metallization and damascene dielectric deposition tools. |
2003 |
The company launched Da Vinci's spin-clean product based on Lam's pioneering single-wafer spin-clean technology. |
2004 |
The company introduced ALTUS tungsten barrier CVD, a single-system solution that meets contact and via-fill needs at 65 nm and below. |
2006 |
The company acquired Bullen Ultrasonics' (now Silfex, Inc.) silicon growing and fabrication assets for approximately $175 million in cash. |
2008 |
The company acquired SEZ AG (currently known as Lam Research AG), a provider of single-wafer wet-clean processing solutions for the semiconductor industry. |
2012 |
The company acquired Novellus Systems, a semiconductor equipment manufacturer, in an all-stock transaction valued at approximately $3.3 billion. |
2016 |
The company opened the Lam Research Dr. Richard A. Gottscho Laboratory in Fremont. |
2017 |
The company acquired Coventor Inc., a provider of simulation and modeling solutions for semiconductor process technology, micro-electromechanical systems (MEMS), and the Internet of Things (IoT). |
2021 |
The company opened a manufacturing facility in Penang's Batu Kawan, Malaysia. |
2022 |
The company opened Lam Research Korea Technology Center, an advanced research and development (R&D) facility for semiconductor equipment and process technology. |